Статья
2021
Thermodynamic modeling of SiBCN film deposition from the gas phase in the Si—B—N—C—H system
V. A. Shestakov, M. L. Kosinova
Российский химический вестник
https://doi.org/10.1007/s11172-021-3083-9
Abstract / Full Text
Thermodynamic modeling of the chemical vapor deposition (CVD) of films of complex composition in the Si—B—N—C—H system under reduced pressure (0.01 or 10 Torr) in a wide temperature range of 500–1500 K using various organoelement compounds was carried out. An example with mixtures of tetramethylsilane SiMe4 and hexamethyldisilane (SiMe3)2 with trimethylamine borane Me3N · BH3 or triethylamine borane Et3N · BH3 illustrates a possibility to produce films of various compositions: from boron and silicon nitrides to their mixtures with carbides and/or carbon. According to the CVD diagrams, the prevailing equilibrium condensed phases are various phase complexes containing SiC, Si3N4, BN, and C.
Author information
- Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, 3 prosp. Akad. Lavrent’eva, 630090, Novosibirsk, Russian FederationV. A. Shestakov & M. L. Kosinova
References
- G. Barroso, Q. Li, R. K. Bordia, G. Motz, J. Mater. Chem. A, 2019, 7, 1936; DOI: https://doi.org/10.1039/c8ta09054h.
- Silicon Carbide — Materials, Processing and Applications in Electronic Devices, Ed. M. Mukherjee, InTech, 2011, 546 pp.
- A. Viard, D. Fonblanc, D. Lopez-Ferber, M. Schmidt, A. Lale, C. Durif, M. Balestrat, F. Rossignol, M. Weinmann, R. Riedel, S. Bernard, Adv. Eng. Mater., 2018, 20, 1800360; DOI: https://doi.org/10.1002/adem.201800360.
- P. Zhang, D. Jia, Z. Yang, X. Duan, Y. Zhou, J. Adv. Ceram., 2012, 1, 157; DOI: https://doi.org/10.1007/s40145-012-0017-x.
- A. Jalowiecki, J. Bill, F. Aldinger, J. Mayer, Composites, 1996, 27A, 717; DOI: S1359-835X(96)00004-8.
- D. Hegemann, R. Riedel, C. Oehr, Chem. Vap. Deposition, 1999, 5, 61; DOI: 0948-1907/99/0203-0061.
- J. Wilden, A. Wank, A. Bykava, Surf. Coat. Technol., 2005, 200, 612; DOI: https://doi.org/10.1016/j.surfcoat.2005.01.027.
- H. A. Samra, A. Kumar, J. Xia, T. Staedler, X. Jiang, Surf. Coat. Technol., 2013, 223, 52; DOI: https://doi.org/10.1016/j.surfcoat.2013.02.028.
- X. Sunn, H. Liu, J. Li, H. Cheng, Ceram. Int., 2016, 42, 82; DOI: https://doi.org/10.1016/j.ceramint.2015.07.116.
- Y. Liu, N. Chai, X. Liu, H. Qin, X. Yin, L. Zhang, L. Cheng, J. Am. Ceram. Soc., 2015, 98, 2703; DOI: https://doi.org/10.1111/jace.13730.
- N. Dong, N. Chai, Y. Liu, X. Liu, H. Qin, X. Yin, L. Zhang, L. Cheng, J. Europ. Ceram. Soc., 2016, 36, 3581; DOI: https://doi.org/10.1016/j.jeurceramsoc.2016.05.030.
- J. Li, M. Zhao, Y. Liu, N. Chai, F. Ye, H. Qin, L. Cheng, L. Zhang, Materials, 2017, 10, 655; DOI: https://doi.org/10.3390/ma10060655.
- C. Wang, Y. Liu, M. Zhao, F. Ye, L. Cheng, Ceram. Int., 2018, 44, 22830; DOI: https://doi.org/10.1016/j.ceramint.2018.09.074.
- W. Yue, Y. Liu, M. Zhao, F. Ye, L. Cheng, J. Mater. Sci. Technol., 2019, 35, 2897; https://doi.org/10.1016/j.jmst.2019.07.018.
- H. Qin, Y. Liu, F. Ye, Z. Cheng, C. Chen, L. Cheng, L. Zhang, J. Alloys Comp., 2019, 771, 747; DOI: https://doi.org/10.1016/j.jallcom.2018.08.006.
- I. S. Merenkov, H. Katsui, M. N. Khomyakov, V. S. Sulyaeva, R. V. Pushkarev, R. Tu, T. Goto, M. L. Kosinova, J. Eur. Ceram. Soc., 2019, 39, 5123; DOI: https://doi.org/10.1016/j.jeurceramsoc.2019.08.006.
- N. Dong, N. Chai, Y. Liu, X. Liu, H. Qin, X. Yin, L. Zhang, L. Cheng, J. Eur. Ceram. Soc., 2016, 36, 3581; DOI: https://doi.org/10.1016/j.jeurceramsoc.2016.05.030.
- A. N. Golubenko, M. L. Kosinova, F. A. Kuznetsov, J. Phys. IV, 2001, 11, 177; DOI: https://doi.org/10.1051/jp4:2001322.
- A. N. Golubenko, M. L. Kosinova, A. A. Titov, F. A. Kuznetsov, Inorg. Mater., 2003, 39, 362; DOI: https://doi.org/10.1023/A:1023275631975.
- V. A. Shestakov, V. I. Kosyakov, M. L. Kosinova, Russ. Chem. Bull., 2019, 68, 1983; DOI: https://doi.org/1066-5285/19/6811-1983.
- V. I. Kosyakov, V. A. Shestakov, M. L. Kosinova, Russ. J. Inorg. Chem., 2018, 63, 822; DOI: https://doi.org/10.1134/S0036023618060153.
- V. A. Shestakov, E. N. Ermakova, S. V. Sysoev, V. I. Kosyakov, M. L. Kosinova, Russ. Chem. Bull., 2018, 67, 980; DOI: https://doi.org/10.1007/s11172-018-2167-7.
- V. I. Rakhlin, I. P. Tsyrendorzhieva, S. V. Sysoev, Yu. M. Rumyancev, O. V. Maslova, M. L. Kosinova, Russ. Chem. Bull., 2017, 66, 2283; DOI: https://doi.org/1066_5285/17/6612_2283.
- E. N. Ermakova, S. V. Sysoev, L. D. Nikulina, I. P. Tsyrendorzhieva, V. I. Rakhlin, M. L. Kosinova, Thermochimica Acta, 2015, 622, 2; DOI: https://doi.org/10.1016/j.tca.2015.02.004.
- F. A. Kuznetsov, V. A. Titov, Proc. Inter. Symp. on Advanced Materials (September 241–30, 1995), Japan, p. 16.