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Статья
2021

Synthesis, Properties and Structure of Arc-PVD Molybdenum and Molybdenum Nitride Monolayer Coatings


O. V. KrysinaO. V. Krysina, Yu. F. IvanovYu. F. Ivanov, N. A. ProkopenkoN. A. Prokopenko, V. V. ShugurovV. V. Shugurov, E. A. PetrikovaE. A. Petrikova, O. S. TolkachevO. S. Tolkachev
Российский физический журнал
https://doi.org/10.1007/s11182-021-02330-5
Abstract / Full Text

The paper deals with the synthesis of coating based on molybdenum and molybdenum nitrides using cathodic arc deposition without the plasma assistance. The properties, composition and structure of the obtained coating are studied in detail. It is found that the nitrogen partial pressure in the gas mixture affects the nitrogen concentration in the coatings and the properties of the latter. The structure and phase composition of the coatings synthesized at a low partial pressure, are investigated by using the X-ray diffraction analysis and scanning electron microscopy.

Author information
  • Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences, Tomsk, RussiaO. V. Krysina, Yu. F. Ivanov, N. A. Prokopenko, V. V. Shugurov, E. A. Petrikova & O. S. Tolkachev
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