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Статья
2020

Space-Charge Region Near Dielectric Target Under Electron-Beam Irradiation


V. A. BurdovitsinV. A. Burdovitsin, E. M. OksE. M. Oks
Российский физический журнал
https://doi.org/10.1007/s11182-020-01937-4
Abstract / Full Text

The paper shows that the potential of isolated metal or dielectric target under electron-beam irradiation in medium vacuum can be estimated through measuring the parameters of beam plasma and the extent of the space-charge region between the target and beam plasma. This potential allows comparing the properties of the secondary electron emission from target materials.

Author information
  • Tomsk State University of Control Systems and Radioelectronics, Tomsk, RussiaV. A. Burdovitsin & E. M. Oks
  • Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences, Tomsk, RussiaE. M. Oks
References
  1. J. P. Sheehan and N. Hershkowitz, J. Vac. Sci. Technol. A, 30, 031302 (2012).
  2. V. A. Burdovitsin, D. B. Zolotukhin, E. M. Oks, et al., Doklady tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 20, No. 3, 65–70 (2017).
  3. H. Chen, H. Gong, and C. K. Ong, J. Appl. Phys., 76, No. 2, 806–809 (1994).
  4. M. Belhaj, O. Jbara, S. Odof, et al., Scanning, 22, 352–356 (2000).
  5. V. A. Burdovitsin, A. V. Medovnik, E. M. Oks, et al., Tech. Phys. Russ. J. Appl. Phys., 82, No. 10, 1424–1429 (2012).
  6. V. A. Burdovitsin and E. M. Oks, Laser Part. Beams, 26, No. 04, 619–635 (2008).
  7. V. A. Burdovitsin, D. B. Zolotukhin, E. M. Oks, et al., J. Phys. D: Appl. Phys., 52, 285204 (2019).
  8. M. A. Lieberman, Handbook of Plasma Immersion Ion Implantation and Deposition, Chapter 2, A. Anders, ed., Willey and Sons (2000).
  9. V. A. Burdovitsin, E. M. Oks, and D. B. Zolotukhin, J. Phys. D: Appl. Phys., 51, 304006 (2018).